product ＞ scrub       ■Includes scrub and spin stage. ■Various recipe with multi parameter control. ■MEGA-SONIC (option) can be attachid.   ▲TOP           ■Real both sides scrub R&D full automation Wet-In/Dry-Out system.   ▲TOP         ■Both sides of "φ8" using of φ12 combinedly scrub R&D system.   ▲TOP   English HOME