
|
|
|
Specification |
|
|
Type |
fully automatic back grinder |
|
Wafer size |
chip~200mm |
|
axis |
2axis |
|
wheel size |
250mm |
|
chuck tabie (MAX) |
210mm |
|
Number of table |
3 |
|
polishing function |
- |
|
foot print |
W1100xD1350xH2150mm |
|
application |
Si/SiC/Sapphire ALTIC/etc |

MAT GYR-823A

Layout