隼（ＨＡＹＡＢＵＳＡ）
GYR-823A


◇東京都経営革新優秀賞　奨励賞」を受賞しました。

◇中古装置販売中

◇3インチサファイアウェハー販売中

◇New　Machine　MATUHK-541A　受賞しました

◇板橋青年優秀技能者賞

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Process test and Foundry service

　

Foundry service

  1. ■ Process test and foundry service
     MAT Inc. provides a total solution of Process development, design and foundry service. We can control the number of the sample depend on the customer's request.


Grinding service

  1. ■ Wafer thinning by grinding
     MAT Inc. provides a thinning process (max dia. is 300 φ) by the high performance grinding machine. We can control the final thickness for customer’s　request from the mirror surface finishing by grinding
    through the polishing surface and cleaning.



Material evaluation

  1. ■ Consumable material evaluation
    MAT Inc. evaluates the slurry, pad, cleaning chemical, grinding wheel and support the process arrangement after the testing in real time.



Sample materials

  1. ■ Sample material for the development device
    MAT Inc. provides a sample device production service by planarization.


Typical process results

Case１：Damascene process
Case１：Damascene process

Case2: Planarization of the insulator of TSV
Case2: Planarization of the insulator of TSV

Case3 :Planarization of the metal
Case3 :Planarization of the metal

Case4: Improvement of the surface roughness
Case4: Improvement of the surface roughness

　

The table of MAT equipments

Type
 Brand
 Model
 Wafer size
 Function
Processing machine
 CMP R&D system
 MAT
 MAT ARW-681MKⅡ
 4,5,6,8
 100mm dia.Sweep or for Large wheel use
MAT
 MAT BC-15C
 chip
4,5,6
 Desktop type
MAT
 MAT ARW-8C1MS
 MAX 300mm dia.
Grinder R&D system
 MAT
 MAT GYR-311MA
 MAX 300mm dia.
Defects sampling machine for analysis
 MAT
 MAT Polish Analyzer
 Chip
MAT
 MAT X-Section Analyzer
 Chip
Cleaning system
 Cleaning R&D system
 MAT
 MAT ZAB-8S1M
 ～8
MAT
 MAT SPN-8M
 8
Measuring instrument
 Metal thickness meter
 NAPSON
 RT-80 RG-120
 ～12
Profiler
 KLA Tencor
 P16
 ～8
 tracer 2μm ＆ submicron
Thickness meter for wafer
 ADE
 ULTRA GAGE 9500
 4,5,6,8
 Auto loader included
Optical microscope
 OLYMPUS
 BH2-UMA

Inspection light source
 HAYASHI
 LA-150TX

Laser microscope
 KEYENCE
 VK-8500
 ～8
 3-D form measurement
Height gage
 Nikon
 MF1001
 ～ around 12
 resolution 0.1μm
Optical surface profiler
 Canon
 Zygo New View200

Optical thickness meter
 MAT
 MOEGI
 ～8

MAT laboratory

Class: 1000
* Equipments
* CMP system for R&D(max dia. is 12")
* Table-top CMP system
* Grinder
* Cleaning system（max dia. is 12"）
* Thickness meter
* Profiler
* Laser microscope
* Optical microscope


Process development, design, and foundry service
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Contact us at:

 Sales Department, MAT Inc.
TEL:03-5914-6355
FAX:03-5914-6356

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