隼（ＨＡＹＡＢＵＳＡ）
GYR-823A


◇東京都経営革新優秀賞　奨励賞」を受賞しました。

◇中古装置販売中

◇3インチサファイアウェハー販売中

◇New　Machine　MATUHK-541A　受賞しました

◇板橋青年優秀技能者賞

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Cleaning system

MAT's cleaning systems is the device designed that applies to the POST CMP process. We approach the metal contamination and the removal of the particle after CMP from the process requirement with the users, and propose the device configuration to within customer's budget to solve the problem.
ZAB-8S1M
ZAB-8S1M
ZAB-8W3AS
ZAB-8C5A
Full-Automatic double side cleaning system for 6″ and 8" wafer
Single side cleaning system for 8” wafer
Full-Automatic two sides cleaning system for exclusive 8" wafer
Full-Automatic double side cleaning system for 8″ and 12" wafer
ZAB-6W2M
ZAB-8S1M
ZAB-8W3AS
ZAB-8C5A

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